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Product information

Chemical name：Tetraethyl orthosilicate (electronic grade)

Product code：BOSIL-781

CAS：78-10-4

Structural formula：

Molecular formula：C₈H₂₀O₄Si

Empirical formula：208.33

Properties

Electronic grade Tetraethyl orthosilicate(TEOS) is mainly used in the CVD processof IC wafer manufacturing., which is strictly required of a high purity, above 8N, and all impurities must be less than 1ppb, especially on metal ion impurities (Na,K,Mg,Fe,Ca,Al,etc.) , metal ions are electroactive impurities, which will reduce the insulation performance of the silicon dioxide film layer deposited on the semiconductor device, and will lead to the interconnection of micron-scale circuits, resulting in the scrap of circuit boards. With the low contents of total cation and total chlorine,the electronic grade raw material, Tetraethyl orthosilicate, is fully qualified to be processed into electronic grade Tetraethyl orthosilicate.

Technical data

Note: the above data are for reference only, can not be used as a technical specification 

Applications

Tetraethyl orthosilicate (electronic grade) is used for processing into electronic grade Tetraethyl orthosilicatefor wafer manufacture. It is used to produce silica dioxide thin films, which is an electronic chemical required in the manufacture of and is an electronic chemical required for the manufacture of semiconductors, discrete devices and MEMS(micro electro mechanical systems).

Tetraethyl orthosilicate(electronic grade) is used in the semiconductor industry to produce high quality grinding particles.

Tetraethyl orthosilicate(electronic grade) can be used as chlorine-free or ultra-low chlorine heat-resistant material.

Shelf life

Sealed storage, shelf life of 12 months, After the container is opened, it should be sealed to prevent the entry of water vapor and hydrolysis.

Packaging

For sizes and models of packaging, please contact the sales department of Hubei Bluesky New Material Inc